Subtractive Photonic Waveguide-Coupled Photodetectors in 180nm Bulk CMOS

C. Ives, A. Hajimiri

Subtractive photonics-electronics co-integration in standard 180 nm bulk CMOS process is demonstrated by low-loss suspended waveguides made from BEOL low-k doped glass, waveguide coupled photodiodes, and full integration of a waveguide coupled photodiode and a TIA. The doped glass waveguides operate over broad range of wavelengths including visible and IR and have losses as low as 4.1 dB/cm at 1,550 nm and 4.8 dB/cm at 780 nm. The photodiodes have a responsivity as high as 200 mA/W at 780 nm.