Compact, High Extinction Ratio Silicon Mach-Zehnder Modulator with Corrugated Waveguides

R. Hosseini, A. Khachaturian, M. Cătuneanu, P. Khial, R. Fatemi, A. Hajimiri, and K. Jamshidi

An integrated silicon photonic MZM modulator with a slow-wave architecture to reduce π is presented. This structure achieves an 80% enhancement in extinction ratio and has a 14GHz bandwidth with 1mm long modulator arms.